A compact high-precision periodic-error-free heterodyne interferometer. | Academic Article individual record
abstract

We present the design, bench-top setup, and experimental results of a compact heterodyne interferometer that achieves picometer-level displacement sensitivities in air over frequencies above 100 MHz. The optical configuration with spatially separated beams prevents frequency and polarization mixing, and therefore eliminates periodic errors. The interferometer is designed to maximize common-mode optical laser beam paths to obtain high rejection of environmental disturbances, such as temperature fluctuations and acoustics. The results of our experiments demonstrate the short- and long-term stabilities of the system during stationary and dynamic measurements. In addition, we provide measurements that compare our interferometer prototype with a commercial system, verifying our higher sensitivity of 3 pm, higher thermal stability by a factor of two, and periodic-error-free performance.

publication outlet

J Opt Soc Am A Opt Image Sci Vis

author list (cited authors)
Joo, K., Clark, E., Zhang, Y., Ellis, J. D., & Guzmn, F.,Joo, K., Clark, E., Zhang, Y., Ellis, J. D., & Guzmán, F.
publication date
2020
publisher
citation count

7

PubMed ID
32902415
identifier
600422SE
Digital Object Identifier (DOI)
start page
B11
end page
B18
volume
37
issue
9