Passivation of the 157-nm pellicle with nanometer thin films | Conference Paper individual record
abstract

The polymeric 157 nm pellicle was passivated on both sides to isolate it from environmental contamination. TAF pellicles were sputter deposited with 5 nm thick films of CaF 2, MgF 2, Al, Mg, TiN, SiN x, Si, and PTFE, separately. The light transmission and life expectancy of the coated and uncoated pellicles were investigated. The coated pellicles were also analyzed with ESCA for surface structure changes. The coating process changed the pellicle's deterioration mechanism and life expectancy.

authors
author list (cited authors)
Kuo, Y., Lu, J., Tewg, J., & Zimmerman, P. A.
publication date
2003
publisher
spie Publisher
keywords
  • 157 Nm LithographyPellicle5 Nm Thin FilmPassivation Of Pellicle